Material and electrical characterization of HfO2 films for MIM capacitors application
Materials Research Society Symposium - Proceedings
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2014
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sg-nus-scholar.10635-839372015-01-07T06:34:57Z Material and electrical characterization of HfO2 films for MIM capacitors application Hu, H. Zhu, C. Lu, Y.F. Wu, Y.H. Liew, T. Li, M.F. Cho, B.J. Choi, W.K. Yakovlev, N. ELECTRICAL & COMPUTER ENGINEERING Materials Research Society Symposium - Proceedings 766 363-369 MRSPD 2014-10-07T04:46:55Z 2014-10-07T04:46:55Z 2003 Conference Paper Hu, H.,Zhu, C.,Lu, Y.F.,Wu, Y.H.,Liew, T.,Li, M.F.,Cho, B.J.,Choi, W.K.,Yakovlev, N. (2003). Material and electrical characterization of HfO2 films for MIM capacitors application. Materials Research Society Symposium - Proceedings 766 : 363-369. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/83937 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
| country |
Singapore |
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ScholarBank@NUS |
| description |
Materials Research Society Symposium - Proceedings |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Hu, H. Zhu, C. Lu, Y.F. Wu, Y.H. Liew, T. Li, M.F. Cho, B.J. Choi, W.K. Yakovlev, N. |
| format |
Conference or Workshop Item |
| author |
Hu, H. Zhu, C. Lu, Y.F. Wu, Y.H. Liew, T. Li, M.F. Cho, B.J. Choi, W.K. Yakovlev, N. |
| spellingShingle |
Hu, H. Zhu, C. Lu, Y.F. Wu, Y.H. Liew, T. Li, M.F. Cho, B.J. Choi, W.K. Yakovlev, N. Material and electrical characterization of HfO2 films for MIM capacitors application |
| author_sort |
Hu, H. |
| title |
Material and electrical characterization of HfO2 films for MIM capacitors application |
| title_short |
Material and electrical characterization of HfO2 films for MIM capacitors application |
| title_full |
Material and electrical characterization of HfO2 films for MIM capacitors application |
| title_fullStr |
Material and electrical characterization of HfO2 films for MIM capacitors application |
| title_full_unstemmed |
Material and electrical characterization of HfO2 films for MIM capacitors application |
| title_sort |
material and electrical characterization of hfo2 films for mim capacitors application |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/83937 |
| _version_ |
1681089527336140800 |