Micro-Raman spectroscopic investigation of NiSi films formed on BF2 +-, B+-and non-implanted (100) Si substrates

Micro-Raman spectroscopic investigation of NiSi films formed on BF2 +-, B+-and non-implanted (100) Si substrates

Materials Research Society Symposium - Proceedings

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Bibliographic Details
Main Authors: Donthu, S.K., Chi, D.Z., Wong, A.S.W., Chua, S.J., Tripathy, S.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83950
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/83950

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