Micro-Raman spectroscopic investigation of NiSi films formed on BF2 +-, B+-and non-implanted (100) Si substrates

Materials Research Society Symposium - Proceedings

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Main Authors:	Donthu, S.K., Chi, D.Z., Wong, A.S.W., Chua, S.J., Tripathy, S.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83950
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-839502015-01-08T02:51:54Z Micro-Raman spectroscopic investigation of NiSi films formed on BF2 +-, B+-and non-implanted (100) Si substrates Donthu, S.K. Chi, D.Z. Wong, A.S.W. Chua, S.J. Tripathy, S. ELECTRICAL & COMPUTER ENGINEERING Materials Research Society Symposium - Proceedings 716 465-470 MRSPD 2014-10-07T04:47:04Z 2014-10-07T04:47:04Z 2002 Conference Paper Donthu, S.K.,Chi, D.Z.,Wong, A.S.W.,Chua, S.J.,Tripathy, S. (2002). Micro-Raman spectroscopic investigation of NiSi films formed on BF2 +-, B+-and non-implanted (100) Si substrates. Materials Research Society Symposium - Proceedings 716 : 465-470. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/83950 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Materials Research Society Symposium - Proceedings
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Donthu, S.K. Chi, D.Z. Wong, A.S.W. Chua, S.J. Tripathy, S.
format	Conference or Workshop Item
author	Donthu, S.K. Chi, D.Z. Wong, A.S.W. Chua, S.J. Tripathy, S.
spellingShingle	Donthu, S.K. Chi, D.Z. Wong, A.S.W. Chua, S.J. Tripathy, S. Micro-Raman spectroscopic investigation of NiSi films formed on BF2 +-, B+-and non-implanted (100) Si substrates
author_sort	Donthu, S.K.
title	Micro-Raman spectroscopic investigation of NiSi films formed on BF2 +-, B+-and non-implanted (100) Si substrates
title_short	Micro-Raman spectroscopic investigation of NiSi films formed on BF2 +-, B+-and non-implanted (100) Si substrates
title_full	Micro-Raman spectroscopic investigation of NiSi films formed on BF2 +-, B+-and non-implanted (100) Si substrates
title_fullStr	Micro-Raman spectroscopic investigation of NiSi films formed on BF2 +-, B+-and non-implanted (100) Si substrates
title_full_unstemmed	Micro-Raman spectroscopic investigation of NiSi films formed on BF2 +-, B+-and non-implanted (100) Si substrates
title_sort	micro-raman spectroscopic investigation of nisi films formed on bf2 +-, b+-and non-implanted (100) si substrates
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83950
_version_	1681089529688096768

Micro-Raman spectroscopic investigation of NiSi films formed on BF2 +-, B+-and non-implanted (100) Si substrates

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