Modulation of effective Schottky barrier height of nickel silicide on silicon using pre-silicide ammonium sulfide treatment

• Main Authors: Lim, P.S.Y., Zhi Chi, D., Chong Lim, P., Yeo, Y.-C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/83974
• Institution: National University of Singapore

10.1063/1.3700224