Self-aligned NiGeSi contacts on gallium arsenide for III-V MOSFETs

10.1149/1.3487634

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Bibliographic Details
Main Authors: Zhang, X., Guo, H., Chin, H.-C., Gong, X., Lim, P.S.Y., Yeo, Y.-C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84166
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-841662023-10-30T08:21:10Z Self-aligned NiGeSi contacts on gallium arsenide for III-V MOSFETs Zhang, X. Guo, H. Chin, H.-C. Gong, X. Lim, P.S.Y. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1149/1.3487634 ECS Transactions 33 6 1021-1028 2014-10-07T04:49:33Z 2014-10-07T04:49:33Z 2010 Conference Paper Zhang, X., Guo, H., Chin, H.-C., Gong, X., Lim, P.S.Y., Yeo, Y.-C. (2010). Self-aligned NiGeSi contacts on gallium arsenide for III-V MOSFETs. ECS Transactions 33 (6) : 1021-1028. ScholarBank@NUS Repository. https://doi.org/10.1149/1.3487634 9781566778251 19385862 http://scholarbank.nus.edu.sg/handle/10635/84166 000314957600105 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1149/1.3487634
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Zhang, X.
Guo, H.
Chin, H.-C.
Gong, X.
Lim, P.S.Y.
Yeo, Y.-C.
format Conference or Workshop Item
author Zhang, X.
Guo, H.
Chin, H.-C.
Gong, X.
Lim, P.S.Y.
Yeo, Y.-C.
spellingShingle Zhang, X.
Guo, H.
Chin, H.-C.
Gong, X.
Lim, P.S.Y.
Yeo, Y.-C.
Self-aligned NiGeSi contacts on gallium arsenide for III-V MOSFETs
author_sort Zhang, X.
title Self-aligned NiGeSi contacts on gallium arsenide for III-V MOSFETs
title_short Self-aligned NiGeSi contacts on gallium arsenide for III-V MOSFETs
title_full Self-aligned NiGeSi contacts on gallium arsenide for III-V MOSFETs
title_fullStr Self-aligned NiGeSi contacts on gallium arsenide for III-V MOSFETs
title_full_unstemmed Self-aligned NiGeSi contacts on gallium arsenide for III-V MOSFETs
title_sort self-aligned nigesi contacts on gallium arsenide for iii-v mosfets
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/84166
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