Silicon-carbon source/drain: Selective epitaxy, process integration, and transistor strain engineering
10.1149/1.2355908
Saved in:
Main Author: | |
---|---|
Other Authors: | |
Format: | Conference or Workshop Item |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/84181 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |