SIMS study on N diffusion in hafnium oxynitride

10.1016/j.apsusc.2004.03.116

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Bibliographic Details
Main Authors:	Gui, D., Kang, J., Yu, H., Lim, H.F.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Diffusion Hafnium oxynitride High-k Segregation SIMS
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/84186
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Institution:	National University of Singapore

Description
Summary:	10.1016/j.apsusc.2004.03.116

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