SIMS study on N diffusion in hafnium oxynitride

10.1016/j.apsusc.2004.03.116

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Bibliographic Details
Main Authors:	Gui, D., Kang, J., Yu, H., Lim, H.F.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Diffusion Hafnium oxynitride High-k Segregation SIMS
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/84186
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-84186
record_format	dspace
spelling	sg-nus-scholar.10635-841862023-10-27T07:21:19Z SIMS study on N diffusion in hafnium oxynitride Gui, D. Kang, J. Yu, H. Lim, H.F. ELECTRICAL & COMPUTER ENGINEERING Diffusion Hafnium oxynitride High-k Segregation SIMS 10.1016/j.apsusc.2004.03.116 Applied Surface Science 231-232 590-593 ASUSE 2014-10-07T04:49:47Z 2014-10-07T04:49:47Z 2004-06-15 Conference Paper Gui, D., Kang, J., Yu, H., Lim, H.F. (2004-06-15). SIMS study on N diffusion in hafnium oxynitride. Applied Surface Science 231-232 : 590-593. ScholarBank@NUS Repository. https://doi.org/10.1016/j.apsusc.2004.03.116 01694332 http://scholarbank.nus.edu.sg/handle/10635/84186 000222427700115 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Diffusion Hafnium oxynitride High-k Segregation SIMS
spellingShingle	Diffusion Hafnium oxynitride High-k Segregation SIMS Gui, D. Kang, J. Yu, H. Lim, H.F. SIMS study on N diffusion in hafnium oxynitride
description	10.1016/j.apsusc.2004.03.116
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Gui, D. Kang, J. Yu, H. Lim, H.F.
format	Conference or Workshop Item
author	Gui, D. Kang, J. Yu, H. Lim, H.F.
author_sort	Gui, D.
title	SIMS study on N diffusion in hafnium oxynitride
title_short	SIMS study on N diffusion in hafnium oxynitride
title_full	SIMS study on N diffusion in hafnium oxynitride
title_fullStr	SIMS study on N diffusion in hafnium oxynitride
title_full_unstemmed	SIMS study on N diffusion in hafnium oxynitride
title_sort	sims study on n diffusion in hafnium oxynitride
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/84186
_version_	1781784428921487360

SIMS study on N diffusion in hafnium oxynitride

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