SIMS study on N diffusion in hafnium oxynitride
10.1016/j.apsusc.2004.03.116
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Main Authors: | Gui, D., Kang, J., Yu, H., Lim, H.F. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/84186 |
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Institution: | National University of Singapore |
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