Wafer-level vacuum sealing and encapsulation for fabrication of CMOS MEMS thermoelectric power generators
10.1109/MEMSYS.2010.5442421
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2014
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sg-nus-scholar.10635-843592024-11-09T08:00:34Z Wafer-level vacuum sealing and encapsulation for fabrication of CMOS MEMS thermoelectric power generators Xie, J. Lee, C. Wang, M.-F. Feng, H. ELECTRICAL & COMPUTER ENGINEERING 10.1109/MEMSYS.2010.5442421 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 1175-1178 PMEME 2014-10-07T04:51:47Z 2014-10-07T04:51:47Z 2010 Conference Paper Xie, J.,Lee, C.,Wang, M.-F.,Feng, H. (2010). Wafer-level vacuum sealing and encapsulation for fabrication of CMOS MEMS thermoelectric power generators. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) : 1175-1178. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/MEMSYS.2010.5442421" target="_blank">https://doi.org/10.1109/MEMSYS.2010.5442421</a> 9781424457649 10846999 http://scholarbank.nus.edu.sg/handle/10635/84359 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
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ScholarBank@NUS |
| description |
10.1109/MEMSYS.2010.5442421 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Xie, J. Lee, C. Wang, M.-F. Feng, H. |
| format |
Conference or Workshop Item |
| author |
Xie, J. Lee, C. Wang, M.-F. Feng, H. |
| spellingShingle |
Xie, J. Lee, C. Wang, M.-F. Feng, H. Wafer-level vacuum sealing and encapsulation for fabrication of CMOS MEMS thermoelectric power generators |
| author_sort |
Xie, J. |
| title |
Wafer-level vacuum sealing and encapsulation for fabrication of CMOS MEMS thermoelectric power generators |
| title_short |
Wafer-level vacuum sealing and encapsulation for fabrication of CMOS MEMS thermoelectric power generators |
| title_full |
Wafer-level vacuum sealing and encapsulation for fabrication of CMOS MEMS thermoelectric power generators |
| title_fullStr |
Wafer-level vacuum sealing and encapsulation for fabrication of CMOS MEMS thermoelectric power generators |
| title_full_unstemmed |
Wafer-level vacuum sealing and encapsulation for fabrication of CMOS MEMS thermoelectric power generators |
| title_sort |
wafer-level vacuum sealing and encapsulation for fabrication of cmos mems thermoelectric power generators |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/84359 |
| _version_ |
1821230952170389504 |