Effect of degree of amorphization of Si on the formation of titanium silicide

10.1063/1.1432768

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Main Authors:	Tan, C.C., Lu, L., See, A., Chan, L.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/85046
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-85046
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spelling	sg-nus-scholar.10635-850462023-10-30T21:14:51Z Effect of degree of amorphization of Si on the formation of titanium silicide Tan, C.C. Lu, L. See, A. Chan, L. MECHANICAL ENGINEERING 10.1063/1.1432768 Journal of Applied Physics 91 5 2842-2846 JAPIA 2014-10-07T09:03:22Z 2014-10-07T09:03:22Z 2002-02-15 Article Tan, C.C., Lu, L., See, A., Chan, L. (2002-02-15). Effect of degree of amorphization of Si on the formation of titanium silicide. Journal of Applied Physics 91 (5) : 2842-2846. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1432768 00218979 http://scholarbank.nus.edu.sg/handle/10635/85046 000174182400037 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.1432768
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Tan, C.C. Lu, L. See, A. Chan, L.
format	Article
author	Tan, C.C. Lu, L. See, A. Chan, L.
spellingShingle	Tan, C.C. Lu, L. See, A. Chan, L. Effect of degree of amorphization of Si on the formation of titanium silicide
author_sort	Tan, C.C.
title	Effect of degree of amorphization of Si on the formation of titanium silicide
title_short	Effect of degree of amorphization of Si on the formation of titanium silicide
title_full	Effect of degree of amorphization of Si on the formation of titanium silicide
title_fullStr	Effect of degree of amorphization of Si on the formation of titanium silicide
title_full_unstemmed	Effect of degree of amorphization of Si on the formation of titanium silicide
title_sort	effect of degree of amorphization of si on the formation of titanium silicide
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/85046
_version_	1781784567210835968

Effect of degree of amorphization of Si on the formation of titanium silicide

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