Effect of silicon substrate amorphization on the kinetics of reaction between a titanium thin film and silicon
10.1080/0141861021000014885
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| Main Authors: | , , , |
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| 格式: | Article |
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2014
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| 在線閱讀: | http://scholarbank.nus.edu.sg/handle/10635/85062 |
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| 機構: | National University of Singapore |