Effect of silicon substrate amorphization on the kinetics of reaction between a titanium thin film and silicon

Effect of silicon substrate amorphization on the kinetics of reaction between a titanium thin film and silicon

10.1080/0141861021000014885

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Bibliographic Details
Main Authors: Tan, C.C., Lu, L., See, A., Chan, L.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85062
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Institution: National University of Singapore
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Summary:10.1080/0141861021000014885

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