Effect of silicon substrate amorphization on the kinetics of reaction between a titanium thin film and silicon
10.1080/0141861021000014885
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sg-nus-scholar.10635-850622024-11-08T18:21:09Z Effect of silicon substrate amorphization on the kinetics of reaction between a titanium thin film and silicon Tan, C.C. Lu, L. See, A. Chan, L. MECHANICAL ENGINEERING 10.1080/0141861021000014885 Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties 82 16 2923-2934 PMAAD 2014-10-07T09:03:32Z 2014-10-07T09:03:32Z 2002-11-10 Article Tan, C.C., Lu, L., See, A., Chan, L. (2002-11-10). Effect of silicon substrate amorphization on the kinetics of reaction between a titanium thin film and silicon. Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties 82 (16) : 2923-2934. ScholarBank@NUS Repository. https://doi.org/10.1080/0141861021000014885 01418610 http://scholarbank.nus.edu.sg/handle/10635/85062 000179401400003 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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ScholarBank@NUS |
| description |
10.1080/0141861021000014885 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Tan, C.C. Lu, L. See, A. Chan, L. |
| format |
Article |
| author |
Tan, C.C. Lu, L. See, A. Chan, L. |
| spellingShingle |
Tan, C.C. Lu, L. See, A. Chan, L. Effect of silicon substrate amorphization on the kinetics of reaction between a titanium thin film and silicon |
| author_sort |
Tan, C.C. |
| title |
Effect of silicon substrate amorphization on the kinetics of reaction between a titanium thin film and silicon |
| title_short |
Effect of silicon substrate amorphization on the kinetics of reaction between a titanium thin film and silicon |
| title_full |
Effect of silicon substrate amorphization on the kinetics of reaction between a titanium thin film and silicon |
| title_fullStr |
Effect of silicon substrate amorphization on the kinetics of reaction between a titanium thin film and silicon |
| title_full_unstemmed |
Effect of silicon substrate amorphization on the kinetics of reaction between a titanium thin film and silicon |
| title_sort |
effect of silicon substrate amorphization on the kinetics of reaction between a titanium thin film and silicon |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/85062 |
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1821224480455786496 |