Effect of degree of amorphization of Si on the formation of titanium silicide

10.1063/1.1432768

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Bibliographic Details
Main Authors: Tan, C.C., Lu, L., See, A., Chan, L.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85046
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Institution: National University of Singapore