Novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels
10.1088/0960-1317/11/1/305
Saved in:
| Main Authors: | , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
2014
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/85490 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-85490 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-854902024-11-14T01:01:22Z Novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels Tay, F.E.H. Van Kan, J.A. Watt, F. Choong, W.O. PHYSICS MECHANICAL ENGINEERING 10.1088/0960-1317/11/1/305 Journal of Micromechanics and Microengineering 11 1 27-32 JMMIE 2014-10-07T09:08:37Z 2014-10-07T09:08:37Z 2001-01 Article Tay, F.E.H., Van Kan, J.A., Watt, F., Choong, W.O. (2001-01). Novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels. Journal of Micromechanics and Microengineering 11 (1) : 27-32. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/11/1/305 09601317 http://scholarbank.nus.edu.sg/handle/10635/85490 000166561500005 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1088/0960-1317/11/1/305 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Tay, F.E.H. Van Kan, J.A. Watt, F. Choong, W.O. |
| format |
Article |
| author |
Tay, F.E.H. Van Kan, J.A. Watt, F. Choong, W.O. |
| spellingShingle |
Tay, F.E.H. Van Kan, J.A. Watt, F. Choong, W.O. Novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels |
| author_sort |
Tay, F.E.H. |
| title |
Novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels |
| title_short |
Novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels |
| title_full |
Novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels |
| title_fullStr |
Novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels |
| title_full_unstemmed |
Novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels |
| title_sort |
novel micro-machining method for the fabrication of thick-film su-8 embedded micro-channels |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/85490 |
| _version_ |
1821226078879875072 |