Novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels

10.1088/0960-1317/11/1/305

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Bibliographic Details
Main Authors: Tay, F.E.H., Van Kan, J.A., Watt, F., Choong, W.O.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85490
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Institution: National University of Singapore
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