Novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels
10.1088/0960-1317/11/1/305
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Main Authors: | Tay, F.E.H., Van Kan, J.A., Watt, F., Choong, W.O. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/85490 |
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Institution: | National University of Singapore |
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