Surface passivation of (100)-oriented GaAs with ultrathin fluoropolymer films deposited by radio frequency magnetron sputtering of poly(tetrafluoroethylene)

Surface passivation of (100)-oriented GaAs with ultrathin fluoropolymer films deposited by radio frequency magnetron sputtering of poly(tetrafluoroethylene)

10.1149/1.1545466

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Bibliographic Details
Main Authors: Zhang, Y., Kang, E.T., Neoh, K.G., Ang, S.S., Huan, A.C.H.
Other Authors: CHEMICAL & ENVIRONMENTAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85709
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Institution: National University of Singapore
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Summary:10.1149/1.1545466

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