Surface passivation of (100)-oriented GaAs with ultrathin fluoropolymer films deposited by radio frequency magnetron sputtering of poly(tetrafluoroethylene)

10.1149/1.1545466

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Bibliographic Details
Main Authors:	Zhang, Y., Kang, E.T., Neoh, K.G., Ang, S.S., Huan, A.C.H.
Other Authors:	CHEMICAL & ENVIRONMENTAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/85709
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-857092023-10-30T08:58:37Z Surface passivation of (100)-oriented GaAs with ultrathin fluoropolymer films deposited by radio frequency magnetron sputtering of poly(tetrafluoroethylene) Zhang, Y. Kang, E.T. Neoh, K.G. Ang, S.S. Huan, A.C.H. CHEMICAL & ENVIRONMENTAL ENGINEERING MECHANICAL ENGINEERING PHYSICS 10.1149/1.1545466 Journal of the Electrochemical Society 150 3 F53-F59 JESOA 2014-10-07T09:11:13Z 2014-10-07T09:11:13Z 2003-03 Article Zhang, Y., Kang, E.T., Neoh, K.G., Ang, S.S., Huan, A.C.H. (2003-03). Surface passivation of (100)-oriented GaAs with ultrathin fluoropolymer films deposited by radio frequency magnetron sputtering of poly(tetrafluoroethylene). Journal of the Electrochemical Society 150 (3) : F53-F59. ScholarBank@NUS Repository. https://doi.org/10.1149/1.1545466 00134651 http://scholarbank.nus.edu.sg/handle/10635/85709 000181093600055 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1149/1.1545466
author2	CHEMICAL & ENVIRONMENTAL ENGINEERING
author_facet	CHEMICAL & ENVIRONMENTAL ENGINEERING Zhang, Y. Kang, E.T. Neoh, K.G. Ang, S.S. Huan, A.C.H.
format	Article
author	Zhang, Y. Kang, E.T. Neoh, K.G. Ang, S.S. Huan, A.C.H.
spellingShingle	Zhang, Y. Kang, E.T. Neoh, K.G. Ang, S.S. Huan, A.C.H. Surface passivation of (100)-oriented GaAs with ultrathin fluoropolymer films deposited by radio frequency magnetron sputtering of poly(tetrafluoroethylene)
author_sort	Zhang, Y.
title	Surface passivation of (100)-oriented GaAs with ultrathin fluoropolymer films deposited by radio frequency magnetron sputtering of poly(tetrafluoroethylene)
title_short	Surface passivation of (100)-oriented GaAs with ultrathin fluoropolymer films deposited by radio frequency magnetron sputtering of poly(tetrafluoroethylene)
title_full	Surface passivation of (100)-oriented GaAs with ultrathin fluoropolymer films deposited by radio frequency magnetron sputtering of poly(tetrafluoroethylene)
title_fullStr	Surface passivation of (100)-oriented GaAs with ultrathin fluoropolymer films deposited by radio frequency magnetron sputtering of poly(tetrafluoroethylene)
title_full_unstemmed	Surface passivation of (100)-oriented GaAs with ultrathin fluoropolymer films deposited by radio frequency magnetron sputtering of poly(tetrafluoroethylene)
title_sort	surface passivation of (100)-oriented gaas with ultrathin fluoropolymer films deposited by radio frequency magnetron sputtering of poly(tetrafluoroethylene)
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/85709
_version_	1781784740841390080

Surface passivation of (100)-oriented GaAs with ultrathin fluoropolymer films deposited by radio frequency magnetron sputtering of poly(tetrafluoroethylene)

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