Dipole options for 90nm lithography technologies and below

Dipole options for 90nm lithography technologies and below

10.1117/12.485432

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Bibliographic Details
Main Authors: Chua, G.S., Tay, C.J., Quan, C., Lin, Q., Chua, L.H.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
193nm lithography
90nm equal lines and spaces
Diffraction orders
Dipole illumination
RETs
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85927
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Institution: National University of Singapore
id sg-nus-scholar.10635-85927
record_format dspace
spelling sg-nus-scholar.10635-859272024-11-13T04:24:15Z Dipole options for 90nm lithography technologies and below Chua, G.S. Tay, C.J. Quan, C. Lin, Q. Chua, L.H. MECHANICAL ENGINEERING 193nm lithography 90nm equal lines and spaces Diffraction orders Dipole illumination RETs 10.1117/12.485432 Proceedings of SPIE - The International Society for Optical Engineering 5040 III 1284-1295 PSISD 2014-10-07T09:13:49Z 2014-10-07T09:13:49Z 2003 Conference Paper Chua, G.S., Tay, C.J., Quan, C., Lin, Q., Chua, L.H. (2003). Dipole options for 90nm lithography technologies and below. Proceedings of SPIE - The International Society for Optical Engineering 5040 III : 1284-1295. ScholarBank@NUS Repository. https://doi.org/10.1117/12.485432 0277786X http://scholarbank.nus.edu.sg/handle/10635/85927 000184322600127 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic 193nm lithography
90nm equal lines and spaces
Diffraction orders
Dipole illumination
RETs
spellingShingle 193nm lithography
90nm equal lines and spaces
Diffraction orders
Dipole illumination
RETs
Chua, G.S.
Tay, C.J.
Quan, C.
Lin, Q.
Chua, L.H.
Dipole options for 90nm lithography technologies and below
description 10.1117/12.485432
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Chua, G.S.
Tay, C.J.
Quan, C.
Lin, Q.
Chua, L.H.
format Conference or Workshop Item
author Chua, G.S.
Tay, C.J.
Quan, C.
Lin, Q.
Chua, L.H.
author_sort Chua, G.S.
title Dipole options for 90nm lithography technologies and below
title_short Dipole options for 90nm lithography technologies and below
title_full Dipole options for 90nm lithography technologies and below
title_fullStr Dipole options for 90nm lithography technologies and below
title_full_unstemmed Dipole options for 90nm lithography technologies and below
title_sort dipole options for 90nm lithography technologies and below
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/85927
_version_ 1821206702378188800

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