Dipole options for 90nm lithography technologies and below
10.1117/12.485432
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Main Authors: | Chua, G.S., Tay, C.J., Quan, C., Lin, Q., Chua, L.H. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/85927 |
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Institution: | National University of Singapore |
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