Mechanism and dissolution rates of anodic oxide films on silicon

10.1016/j.electacta.2013.04.024

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Bibliographic Details
Main Authors:	Liu, D.Q., Blackwood, D.J.
Other Authors:	MATERIALS SCIENCE AND ENGINEERING
Format:	Article
Published:	2014
Subjects:	Electropolishing Potentiodynamic polarization Salt film Silicon
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/86531
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-86531
record_format	dspace
spelling	sg-nus-scholar.10635-865312023-10-25T22:55:10Z Mechanism and dissolution rates of anodic oxide films on silicon Liu, D.Q. Blackwood, D.J. MATERIALS SCIENCE AND ENGINEERING Electropolishing Potentiodynamic polarization Salt film Silicon 10.1016/j.electacta.2013.04.024 Electrochimica Acta 105 209-217 ELCAA 2014-10-07T09:51:49Z 2014-10-07T09:51:49Z 2013 Article Liu, D.Q., Blackwood, D.J. (2013). Mechanism and dissolution rates of anodic oxide films on silicon. Electrochimica Acta 105 : 209-217. ScholarBank@NUS Repository. https://doi.org/10.1016/j.electacta.2013.04.024 00134686 http://scholarbank.nus.edu.sg/handle/10635/86531 000322414800028 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Electropolishing Potentiodynamic polarization Salt film Silicon
spellingShingle	Electropolishing Potentiodynamic polarization Salt film Silicon Liu, D.Q. Blackwood, D.J. Mechanism and dissolution rates of anodic oxide films on silicon
description	10.1016/j.electacta.2013.04.024
author2	MATERIALS SCIENCE AND ENGINEERING
author_facet	MATERIALS SCIENCE AND ENGINEERING Liu, D.Q. Blackwood, D.J.
format	Article
author	Liu, D.Q. Blackwood, D.J.
author_sort	Liu, D.Q.
title	Mechanism and dissolution rates of anodic oxide films on silicon
title_short	Mechanism and dissolution rates of anodic oxide films on silicon
title_full	Mechanism and dissolution rates of anodic oxide films on silicon
title_fullStr	Mechanism and dissolution rates of anodic oxide films on silicon
title_full_unstemmed	Mechanism and dissolution rates of anodic oxide films on silicon
title_sort	mechanism and dissolution rates of anodic oxide films on silicon
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/86531
_version_	1781784895567167488

Mechanism and dissolution rates of anodic oxide films on silicon

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