Radio-frequency magnetron sputtering and wet thermal oxidation of ZnO thin film
Journal of Applied Physics
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2014
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sg-nus-scholar.10635-866742021-10-14T22:12:07Z Radio-frequency magnetron sputtering and wet thermal oxidation of ZnO thin film Liu, H.F. Chua, S.J. Hu, G.X. Gong, H. Xiang, N. MATERIALS SCIENCE AND ENGINEERING ELECTRICAL & COMPUTER ENGINEERING Journal of Applied Physics 102 4 - JAPIA 2014-10-07T09:53:29Z 2014-10-07T09:53:29Z 2007 Liu, H.F., Chua, S.J., Hu, G.X., Gong, H., Xiang, N. (2007). Radio-frequency magnetron sputtering and wet thermal oxidation of ZnO thin film. Journal of Applied Physics 102 (4) : -. ScholarBank@NUS Repository. 00218979 http://scholarbank.nus.edu.sg/handle/10635/86674 000249156200048 Scopus |
| institution |
National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
Journal of Applied Physics |
| author2 |
MATERIALS SCIENCE AND ENGINEERING |
| author_facet |
MATERIALS SCIENCE AND ENGINEERING Liu, H.F. Chua, S.J. Hu, G.X. Gong, H. Xiang, N. |
| author |
Liu, H.F. Chua, S.J. Hu, G.X. Gong, H. Xiang, N. |
| spellingShingle |
Liu, H.F. Chua, S.J. Hu, G.X. Gong, H. Xiang, N. Radio-frequency magnetron sputtering and wet thermal oxidation of ZnO thin film |
| author_sort |
Liu, H.F. |
| title |
Radio-frequency magnetron sputtering and wet thermal oxidation of ZnO thin film |
| title_short |
Radio-frequency magnetron sputtering and wet thermal oxidation of ZnO thin film |
| title_full |
Radio-frequency magnetron sputtering and wet thermal oxidation of ZnO thin film |
| title_fullStr |
Radio-frequency magnetron sputtering and wet thermal oxidation of ZnO thin film |
| title_full_unstemmed |
Radio-frequency magnetron sputtering and wet thermal oxidation of ZnO thin film |
| title_sort |
radio-frequency magnetron sputtering and wet thermal oxidation of zno thin film |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/86674 |
| _version_ |
1715196398300823552 |