SIMS analysis for the threshold voltage shift of power MOS caused by abnormal dopant diffusion

Conference Proceedings from the International Symposium for Testing and Failure Analysis

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Main Authors: Huang, Y., Zhu, L., Ong, K., Teo, H., Chen, S., Hua, Y., Shen, M., Gong, H.
Other Authors: MATERIALS SCIENCE AND ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/86957
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-869572015-01-07T00:04:45Z SIMS analysis for the threshold voltage shift of power MOS caused by abnormal dopant diffusion Huang, Y. Zhu, L. Ong, K. Teo, H. Chen, S. Hua, Y. Shen, M. Gong, H. MATERIALS SCIENCE AND ENGINEERING Conference Proceedings from the International Symposium for Testing and Failure Analysis 290-292 2014-10-07T09:56:47Z 2014-10-07T09:56:47Z 2012 Conference Paper Huang, Y.,Zhu, L.,Ong, K.,Teo, H.,Chen, S.,Hua, Y.,Shen, M.,Gong, H. (2012). SIMS analysis for the threshold voltage shift of power MOS caused by abnormal dopant diffusion. Conference Proceedings from the International Symposium for Testing and Failure Analysis : 290-292. ScholarBank@NUS Repository. 9781615039791 http://scholarbank.nus.edu.sg/handle/10635/86957 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Conference Proceedings from the International Symposium for Testing and Failure Analysis
author2 MATERIALS SCIENCE AND ENGINEERING
author_facet MATERIALS SCIENCE AND ENGINEERING
Huang, Y.
Zhu, L.
Ong, K.
Teo, H.
Chen, S.
Hua, Y.
Shen, M.
Gong, H.
format Conference or Workshop Item
author Huang, Y.
Zhu, L.
Ong, K.
Teo, H.
Chen, S.
Hua, Y.
Shen, M.
Gong, H.
spellingShingle Huang, Y.
Zhu, L.
Ong, K.
Teo, H.
Chen, S.
Hua, Y.
Shen, M.
Gong, H.
SIMS analysis for the threshold voltage shift of power MOS caused by abnormal dopant diffusion
author_sort Huang, Y.
title SIMS analysis for the threshold voltage shift of power MOS caused by abnormal dopant diffusion
title_short SIMS analysis for the threshold voltage shift of power MOS caused by abnormal dopant diffusion
title_full SIMS analysis for the threshold voltage shift of power MOS caused by abnormal dopant diffusion
title_fullStr SIMS analysis for the threshold voltage shift of power MOS caused by abnormal dopant diffusion
title_full_unstemmed SIMS analysis for the threshold voltage shift of power MOS caused by abnormal dopant diffusion
title_sort sims analysis for the threshold voltage shift of power mos caused by abnormal dopant diffusion
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/86957
_version_ 1681090076563472384