Molecular dynamics with phase-shift-based electronic stopping for calibration of ion implantation profiles in crystalline silicon

10.1016/j.tsf.2005.09.153

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Bibliographic Details
Main Authors:	Chan, H.Y., Nordlund, K., Gossmann, H.-J.L., Harris, M., Montgomery, N.J., Mulcahy, C.P.A., Biswas, S., Srinivasan, M.P., Benistant, F., Ng, C.M., Chan, L.
Other Authors:	CHEMICAL & BIOMOLECULAR ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Electronic stopping Interatomic potential Molecular dynamics Nuclear stopping
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/90627
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-90627
record_format	dspace
spelling	sg-nus-scholar.10635-906272023-10-30T21:40:00Z Molecular dynamics with phase-shift-based electronic stopping for calibration of ion implantation profiles in crystalline silicon Chan, H.Y. Nordlund, K. Gossmann, H.-J.L. Harris, M. Montgomery, N.J. Mulcahy, C.P.A. Biswas, S. Srinivasan, M.P. Benistant, F. Ng, C.M. Chan, L. CHEMICAL & BIOMOLECULAR ENGINEERING Electronic stopping Interatomic potential Molecular dynamics Nuclear stopping 10.1016/j.tsf.2005.09.153 Thin Solid Films 504 1-2 121-125 THSFA 2014-10-09T07:07:21Z 2014-10-09T07:07:21Z 2006-05-10 Conference Paper Chan, H.Y., Nordlund, K., Gossmann, H.-J.L., Harris, M., Montgomery, N.J., Mulcahy, C.P.A., Biswas, S., Srinivasan, M.P., Benistant, F., Ng, C.M., Chan, L. (2006-05-10). Molecular dynamics with phase-shift-based electronic stopping for calibration of ion implantation profiles in crystalline silicon. Thin Solid Films 504 (1-2) : 121-125. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2005.09.153 00406090 http://scholarbank.nus.edu.sg/handle/10635/90627 000236486200029 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Electronic stopping Interatomic potential Molecular dynamics Nuclear stopping
spellingShingle	Electronic stopping Interatomic potential Molecular dynamics Nuclear stopping Chan, H.Y. Nordlund, K. Gossmann, H.-J.L. Harris, M. Montgomery, N.J. Mulcahy, C.P.A. Biswas, S. Srinivasan, M.P. Benistant, F. Ng, C.M. Chan, L. Molecular dynamics with phase-shift-based electronic stopping for calibration of ion implantation profiles in crystalline silicon
description	10.1016/j.tsf.2005.09.153
author2	CHEMICAL & BIOMOLECULAR ENGINEERING
author_facet	CHEMICAL & BIOMOLECULAR ENGINEERING Chan, H.Y. Nordlund, K. Gossmann, H.-J.L. Harris, M. Montgomery, N.J. Mulcahy, C.P.A. Biswas, S. Srinivasan, M.P. Benistant, F. Ng, C.M. Chan, L.
format	Conference or Workshop Item
author	Chan, H.Y. Nordlund, K. Gossmann, H.-J.L. Harris, M. Montgomery, N.J. Mulcahy, C.P.A. Biswas, S. Srinivasan, M.P. Benistant, F. Ng, C.M. Chan, L.
author_sort	Chan, H.Y.
title	Molecular dynamics with phase-shift-based electronic stopping for calibration of ion implantation profiles in crystalline silicon
title_short	Molecular dynamics with phase-shift-based electronic stopping for calibration of ion implantation profiles in crystalline silicon
title_full	Molecular dynamics with phase-shift-based electronic stopping for calibration of ion implantation profiles in crystalline silicon
title_fullStr	Molecular dynamics with phase-shift-based electronic stopping for calibration of ion implantation profiles in crystalline silicon
title_full_unstemmed	Molecular dynamics with phase-shift-based electronic stopping for calibration of ion implantation profiles in crystalline silicon
title_sort	molecular dynamics with phase-shift-based electronic stopping for calibration of ion implantation profiles in crystalline silicon
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/90627
_version_	1781785553083039744

Molecular dynamics with phase-shift-based electronic stopping for calibration of ion implantation profiles in crystalline silicon

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