Molecular dynamics with phase-shift-based electronic stopping for calibration of ion implantation profiles in crystalline silicon

• Main Authors: Chan, H.Y., Nordlund, K., Gossmann, H.-J.L., Harris, M., Montgomery, N.J., Mulcahy, C.P.A., Biswas, S., Srinivasan, M.P., Benistant, F., Ng, C.M., Chan, L.
• Other Authors: CHEMICAL & BIOMOLECULAR ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Electronic stopping; Interatomic potential; Molecular dynamics; Nuclear stopping
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/90627
• Institution: National University of Singapore

10.1016/j.tsf.2005.09.153