Molecular dynamics with phase-shift-based electronic stopping for calibration of ion implantation profiles in crystalline silicon

Molecular dynamics with phase-shift-based electronic stopping for calibration of ion implantation profiles in crystalline silicon

10.1016/j.tsf.2005.09.153

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Bibliographic Details
Main Authors: Chan, H.Y., Nordlund, K., Gossmann, H.-J.L., Harris, M., Montgomery, N.J., Mulcahy, C.P.A., Biswas, S., Srinivasan, M.P., Benistant, F., Ng, C.M., Chan, L.
Other Authors: CHEMICAL & BIOMOLECULAR ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Electronic stopping
Interatomic potential
Molecular dynamics
Nuclear stopping
Online Access:http://scholarbank.nus.edu.sg/handle/10635/90627
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Institution: National University of Singapore

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