Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover

Industrial and Engineering Chemistry Research

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Main Authors:	Chen, B.-H., Zhang, H., Chooi, S.Y.M., Chan, L., Xu, Y., Ye, J.H.
Other Authors:	CHEMICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/91806
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-91806
record_format	dspace
spelling	sg-nus-scholar.10635-918062015-01-12T02:20:04Z Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover Chen, B.-H. Zhang, H. Chooi, S.Y.M. Chan, L. Xu, Y. Ye, J.H. CHEMICAL ENGINEERING Industrial and Engineering Chemistry Research 42 24 6096-6103 IECRE 2014-10-09T08:22:30Z 2014-10-09T08:22:30Z 2003-11-26 Conference Paper Chen, B.-H.,Zhang, H.,Chooi, S.Y.M.,Chan, L.,Xu, Y.,Ye, J.H. (2003-11-26). Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover. Industrial and Engineering Chemistry Research 42 (24) : 6096-6103. ScholarBank@NUS Repository. 08885885 http://scholarbank.nus.edu.sg/handle/10635/91806 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Industrial and Engineering Chemistry Research
author2	CHEMICAL ENGINEERING
author_facet	CHEMICAL ENGINEERING Chen, B.-H. Zhang, H. Chooi, S.Y.M. Chan, L. Xu, Y. Ye, J.H.
format	Conference or Workshop Item
author	Chen, B.-H. Zhang, H. Chooi, S.Y.M. Chan, L. Xu, Y. Ye, J.H.
spellingShingle	Chen, B.-H. Zhang, H. Chooi, S.Y.M. Chan, L. Xu, Y. Ye, J.H. Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover
author_sort	Chen, B.-H.
title	Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover
title_short	Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover
title_full	Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover
title_fullStr	Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover
title_full_unstemmed	Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover
title_sort	corrosive behavior of tungsten in post dry-etch residue remover
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/91806
_version_	1681090834849595392

Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover

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