Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover
Industrial and Engineering Chemistry Research
Saved in:
Main Authors: | , , , , , |
---|---|
Other Authors: | |
Format: | Conference or Workshop Item |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/91806 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
id |
sg-nus-scholar.10635-91806 |
---|---|
record_format |
dspace |
spelling |
sg-nus-scholar.10635-918062015-01-12T02:20:04Z Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover Chen, B.-H. Zhang, H. Chooi, S.Y.M. Chan, L. Xu, Y. Ye, J.H. CHEMICAL ENGINEERING Industrial and Engineering Chemistry Research 42 24 6096-6103 IECRE 2014-10-09T08:22:30Z 2014-10-09T08:22:30Z 2003-11-26 Conference Paper Chen, B.-H.,Zhang, H.,Chooi, S.Y.M.,Chan, L.,Xu, Y.,Ye, J.H. (2003-11-26). Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover. Industrial and Engineering Chemistry Research 42 (24) : 6096-6103. ScholarBank@NUS Repository. 08885885 http://scholarbank.nus.edu.sg/handle/10635/91806 NOT_IN_WOS Scopus |
institution |
National University of Singapore |
building |
NUS Library |
country |
Singapore |
collection |
ScholarBank@NUS |
description |
Industrial and Engineering Chemistry Research |
author2 |
CHEMICAL ENGINEERING |
author_facet |
CHEMICAL ENGINEERING Chen, B.-H. Zhang, H. Chooi, S.Y.M. Chan, L. Xu, Y. Ye, J.H. |
format |
Conference or Workshop Item |
author |
Chen, B.-H. Zhang, H. Chooi, S.Y.M. Chan, L. Xu, Y. Ye, J.H. |
spellingShingle |
Chen, B.-H. Zhang, H. Chooi, S.Y.M. Chan, L. Xu, Y. Ye, J.H. Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover |
author_sort |
Chen, B.-H. |
title |
Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover |
title_short |
Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover |
title_full |
Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover |
title_fullStr |
Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover |
title_full_unstemmed |
Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover |
title_sort |
corrosive behavior of tungsten in post dry-etch residue remover |
publishDate |
2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/91806 |
_version_ |
1681090834849595392 |