Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover

Industrial and Engineering Chemistry Research

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Main Authors: Chen, B.-H., Zhang, H., Chooi, S.Y.M., Chan, L., Xu, Y., Ye, J.H.
Other Authors: CHEMICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/91806
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-918062015-01-12T02:20:04Z Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover Chen, B.-H. Zhang, H. Chooi, S.Y.M. Chan, L. Xu, Y. Ye, J.H. CHEMICAL ENGINEERING Industrial and Engineering Chemistry Research 42 24 6096-6103 IECRE 2014-10-09T08:22:30Z 2014-10-09T08:22:30Z 2003-11-26 Conference Paper Chen, B.-H.,Zhang, H.,Chooi, S.Y.M.,Chan, L.,Xu, Y.,Ye, J.H. (2003-11-26). Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover. Industrial and Engineering Chemistry Research 42 (24) : 6096-6103. ScholarBank@NUS Repository. 08885885 http://scholarbank.nus.edu.sg/handle/10635/91806 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Industrial and Engineering Chemistry Research
author2 CHEMICAL ENGINEERING
author_facet CHEMICAL ENGINEERING
Chen, B.-H.
Zhang, H.
Chooi, S.Y.M.
Chan, L.
Xu, Y.
Ye, J.H.
format Conference or Workshop Item
author Chen, B.-H.
Zhang, H.
Chooi, S.Y.M.
Chan, L.
Xu, Y.
Ye, J.H.
spellingShingle Chen, B.-H.
Zhang, H.
Chooi, S.Y.M.
Chan, L.
Xu, Y.
Ye, J.H.
Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover
author_sort Chen, B.-H.
title Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover
title_short Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover
title_full Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover
title_fullStr Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover
title_full_unstemmed Corrosive Behavior of Tungsten in Post Dry-Etch Residue Remover
title_sort corrosive behavior of tungsten in post dry-etch residue remover
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/91806
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