Deposition of fluoropolymer films on Si(100) surfaces by Rf magnetron sputtering of poly(tetrafluoroethylene)

Deposition of fluoropolymer films on Si(100) surfaces by Rf magnetron sputtering of poly(tetrafluoroethylene)

10.1021/la011606j

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Bibliographic Details
Main Authors: Zhang, Y., Yang, G.H., Kang, E.T., Neoh, K.G., Huang, W., Huan, A.C.H., Wu, S.Y.
Other Authors: CHEMICAL & ENVIRONMENTAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/91920
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Institution: National University of Singapore
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Summary:10.1021/la011606j

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