Deposition of fluoropolymer films on Si(100) surfaces by Rf magnetron sputtering of poly(tetrafluoroethylene)
10.1021/la011606j
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Main Authors: | Zhang, Y., Yang, G.H., Kang, E.T., Neoh, K.G., Huang, W., Huan, A.C.H., Wu, S.Y. |
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Other Authors: | CHEMICAL & ENVIRONMENTAL ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/91920 |
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Institution: | National University of Singapore |
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