Deposition of fluoropolymer films on Si(100) surfaces by Rf magnetron sputtering of poly(tetrafluoroethylene)

10.1021/la011606j

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Bibliographic Details
Main Authors:	Zhang, Y., Yang, G.H., Kang, E.T., Neoh, K.G., Huang, W., Huan, A.C.H., Wu, S.Y.
Other Authors:	CHEMICAL & ENVIRONMENTAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/91920
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-91920
record_format	dspace
spelling	sg-nus-scholar.10635-919202023-10-30T10:05:52Z Deposition of fluoropolymer films on Si(100) surfaces by Rf magnetron sputtering of poly(tetrafluoroethylene) Zhang, Y. Yang, G.H. Kang, E.T. Neoh, K.G. Huang, W. Huan, A.C.H. Wu, S.Y. CHEMICAL & ENVIRONMENTAL ENGINEERING PHYSICS 10.1021/la011606j Langmuir 18 16 6373-6380 LANGD 2014-10-09T09:52:28Z 2014-10-09T09:52:28Z 2002-08-06 Article Zhang, Y., Yang, G.H., Kang, E.T., Neoh, K.G., Huang, W., Huan, A.C.H., Wu, S.Y. (2002-08-06). Deposition of fluoropolymer films on Si(100) surfaces by Rf magnetron sputtering of poly(tetrafluoroethylene). Langmuir 18 (16) : 6373-6380. ScholarBank@NUS Repository. https://doi.org/10.1021/la011606j 07437463 http://scholarbank.nus.edu.sg/handle/10635/91920 000177224400062 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1021/la011606j
author2	CHEMICAL & ENVIRONMENTAL ENGINEERING
author_facet	CHEMICAL & ENVIRONMENTAL ENGINEERING Zhang, Y. Yang, G.H. Kang, E.T. Neoh, K.G. Huang, W. Huan, A.C.H. Wu, S.Y.
format	Article
author	Zhang, Y. Yang, G.H. Kang, E.T. Neoh, K.G. Huang, W. Huan, A.C.H. Wu, S.Y.
spellingShingle	Zhang, Y. Yang, G.H. Kang, E.T. Neoh, K.G. Huang, W. Huan, A.C.H. Wu, S.Y. Deposition of fluoropolymer films on Si(100) surfaces by Rf magnetron sputtering of poly(tetrafluoroethylene)
author_sort	Zhang, Y.
title	Deposition of fluoropolymer films on Si(100) surfaces by Rf magnetron sputtering of poly(tetrafluoroethylene)
title_short	Deposition of fluoropolymer films on Si(100) surfaces by Rf magnetron sputtering of poly(tetrafluoroethylene)
title_full	Deposition of fluoropolymer films on Si(100) surfaces by Rf magnetron sputtering of poly(tetrafluoroethylene)
title_fullStr	Deposition of fluoropolymer films on Si(100) surfaces by Rf magnetron sputtering of poly(tetrafluoroethylene)
title_full_unstemmed	Deposition of fluoropolymer films on Si(100) surfaces by Rf magnetron sputtering of poly(tetrafluoroethylene)
title_sort	deposition of fluoropolymer films on si(100) surfaces by rf magnetron sputtering of poly(tetrafluoroethylene)
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/91920
_version_	1781785712117415936

Deposition of fluoropolymer films on Si(100) surfaces by Rf magnetron sputtering of poly(tetrafluoroethylene)

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