XAFS studies of Al/TiNx films on Si(100) at the Al K- and L3,2-edge

Journal of Synchrotron Radiation

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Bibliographic Details
Main Authors:	Zou, Z., Hu, Y.F., Sham, T.K., Huang, H.H., Xu, G.Q., Seet, C.S., Chan, L.
Other Authors:	CHEMISTRY
Format:	Article
Published:	2014
Subjects:	Al K-edge Al L3,2-edge Diffusion barrier High temperature processing XANES
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/95416
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-95416
record_format	dspace
spelling	sg-nus-scholar.10635-954162015-01-16T16:56:12Z XAFS studies of Al/TiNx films on Si(100) at the Al K- and L3,2-edge Zou, Z. Hu, Y.F. Sham, T.K. Huang, H.H. Xu, G.Q. Seet, C.S. Chan, L. CHEMISTRY Al K-edge Al L3,2-edge Diffusion barrier High temperature processing XANES Journal of Synchrotron Radiation 6 3 524-525 2014-10-16T08:47:36Z 2014-10-16T08:47:36Z 1999-05-01 Article Zou, Z.,Hu, Y.F.,Sham, T.K.,Huang, H.H.,Xu, G.Q.,Seet, C.S.,Chan, L. (1999-05-01). XAFS studies of Al/TiNx films on Si(100) at the Al K- and L3,2-edge. Journal of Synchrotron Radiation 6 (3) : 524-525. ScholarBank@NUS Repository. 09090495 http://scholarbank.nus.edu.sg/handle/10635/95416 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Al K-edge Al L3,2-edge Diffusion barrier High temperature processing XANES
spellingShingle	Al K-edge Al L3,2-edge Diffusion barrier High temperature processing XANES Zou, Z. Hu, Y.F. Sham, T.K. Huang, H.H. Xu, G.Q. Seet, C.S. Chan, L. XAFS studies of Al/TiNx films on Si(100) at the Al K- and L3,2-edge
description	Journal of Synchrotron Radiation
author2	CHEMISTRY
author_facet	CHEMISTRY Zou, Z. Hu, Y.F. Sham, T.K. Huang, H.H. Xu, G.Q. Seet, C.S. Chan, L.
format	Article
author	Zou, Z. Hu, Y.F. Sham, T.K. Huang, H.H. Xu, G.Q. Seet, C.S. Chan, L.
author_sort	Zou, Z.
title	XAFS studies of Al/TiNx films on Si(100) at the Al K- and L3,2-edge
title_short	XAFS studies of Al/TiNx films on Si(100) at the Al K- and L3,2-edge
title_full	XAFS studies of Al/TiNx films on Si(100) at the Al K- and L3,2-edge
title_fullStr	XAFS studies of Al/TiNx films on Si(100) at the Al K- and L3,2-edge
title_full_unstemmed	XAFS studies of Al/TiNx films on Si(100) at the Al K- and L3,2-edge
title_sort	xafs studies of al/tinx films on si(100) at the al k- and l3,2-edge
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/95416
_version_	1681091474752536576

XAFS studies of Al/TiNx films on Si(100) at the Al K- and L3,2-edge

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