XAFS studies of Al/TiNx films on Si(100) at the Al K- and L3,2-edge
Journal of Synchrotron Radiation
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Main Authors: | Zou, Z., Hu, Y.F., Sham, T.K., Huang, H.H., Xu, G.Q., Seet, C.S., Chan, L. |
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Other Authors: | CHEMISTRY |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/95416 |
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Institution: | National University of Singapore |
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