A Monte Carlo study of the extent of proximity effects in e-beam and p-beam writing of PMMA

A Monte Carlo study of the extent of proximity effects in e-beam and p-beam writing of PMMA

10.1016/j.nimb.2007.02.113

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Bibliographic Details
Main Authors: Udalagama, C.N.B., Bettiol, A.A., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
δ-rays
e-Beam writing
Energy deposition
Monte Carlo
p-Beam writing
Online Access:http://scholarbank.nus.edu.sg/handle/10635/95643
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Institution: National University of Singapore
Description
Summary:10.1016/j.nimb.2007.02.113

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