A Monte Carlo study of the extent of proximity effects in e-beam and p-beam writing of PMMA
10.1016/j.nimb.2007.02.113
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Main Authors: | Udalagama, C.N.B., Bettiol, A.A., Watt, F. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/95643 |
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Institution: | National University of Singapore |
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