A Monte Carlo study of the extent of proximity effects in e-beam and p-beam writing of PMMA
10.1016/j.nimb.2007.02.113
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sg-nus-scholar.10635-956432023-10-30T09:06:28Z A Monte Carlo study of the extent of proximity effects in e-beam and p-beam writing of PMMA Udalagama, C.N.B. Bettiol, A.A. Watt, F. PHYSICS δ-rays e-Beam writing Energy deposition Monte Carlo p-Beam writing 10.1016/j.nimb.2007.02.113 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 260 1 384-389 NIMBE 2014-10-16T09:14:06Z 2014-10-16T09:14:06Z 2007-07 Article Udalagama, C.N.B., Bettiol, A.A., Watt, F. (2007-07). A Monte Carlo study of the extent of proximity effects in e-beam and p-beam writing of PMMA. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 260 (1) : 384-389. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2007.02.113 0168583X http://scholarbank.nus.edu.sg/handle/10635/95643 000248264900074 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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δ-rays e-Beam writing Energy deposition Monte Carlo p-Beam writing |
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δ-rays e-Beam writing Energy deposition Monte Carlo p-Beam writing Udalagama, C.N.B. Bettiol, A.A. Watt, F. A Monte Carlo study of the extent of proximity effects in e-beam and p-beam writing of PMMA |
| description |
10.1016/j.nimb.2007.02.113 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Udalagama, C.N.B. Bettiol, A.A. Watt, F. |
| format |
Article |
| author |
Udalagama, C.N.B. Bettiol, A.A. Watt, F. |
| author_sort |
Udalagama, C.N.B. |
| title |
A Monte Carlo study of the extent of proximity effects in e-beam and p-beam writing of PMMA |
| title_short |
A Monte Carlo study of the extent of proximity effects in e-beam and p-beam writing of PMMA |
| title_full |
A Monte Carlo study of the extent of proximity effects in e-beam and p-beam writing of PMMA |
| title_fullStr |
A Monte Carlo study of the extent of proximity effects in e-beam and p-beam writing of PMMA |
| title_full_unstemmed |
A Monte Carlo study of the extent of proximity effects in e-beam and p-beam writing of PMMA |
| title_sort |
monte carlo study of the extent of proximity effects in e-beam and p-beam writing of pmma |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/95643 |
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1781786302879891456 |