Alternating phase shifted scattering bars for low k1 trench pattering
10.1116/1.2203637
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2014
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sg-nus-scholar.10635-957452023-10-30T09:12:12Z Alternating phase shifted scattering bars for low k1 trench pattering Mehta, S.S. Kumar, R. Singh, N. Suda, H. Kubota, T. Kimura, Y. Kinoshita, H. Wong, T.K.S. Wei, J. PHYSICS 10.1116/1.2203637 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 24 3 1464-1469 JVTBD 2014-10-16T09:15:19Z 2014-10-16T09:15:19Z 2006-05 Article Mehta, S.S., Kumar, R., Singh, N., Suda, H., Kubota, T., Kimura, Y., Kinoshita, H., Wong, T.K.S., Wei, J. (2006-05). Alternating phase shifted scattering bars for low k1 trench pattering. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 24 (3) : 1464-1469. ScholarBank@NUS Repository. https://doi.org/10.1116/1.2203637 10711023 http://scholarbank.nus.edu.sg/handle/10635/95745 000238790000069 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1116/1.2203637 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Mehta, S.S. Kumar, R. Singh, N. Suda, H. Kubota, T. Kimura, Y. Kinoshita, H. Wong, T.K.S. Wei, J. |
| format |
Article |
| author |
Mehta, S.S. Kumar, R. Singh, N. Suda, H. Kubota, T. Kimura, Y. Kinoshita, H. Wong, T.K.S. Wei, J. |
| spellingShingle |
Mehta, S.S. Kumar, R. Singh, N. Suda, H. Kubota, T. Kimura, Y. Kinoshita, H. Wong, T.K.S. Wei, J. Alternating phase shifted scattering bars for low k1 trench pattering |
| author_sort |
Mehta, S.S. |
| title |
Alternating phase shifted scattering bars for low k1 trench pattering |
| title_short |
Alternating phase shifted scattering bars for low k1 trench pattering |
| title_full |
Alternating phase shifted scattering bars for low k1 trench pattering |
| title_fullStr |
Alternating phase shifted scattering bars for low k1 trench pattering |
| title_full_unstemmed |
Alternating phase shifted scattering bars for low k1 trench pattering |
| title_sort |
alternating phase shifted scattering bars for low k1 trench pattering |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/95745 |
| _version_ |
1781786321593827328 |