Alternating phase shifted scattering bars for low k1 trench pattering

Alternating phase shifted scattering bars for low k1 trench pattering

10.1116/1.2203637

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Bibliographic Details
Main Authors: Mehta, S.S., Kumar, R., Singh, N., Suda, H., Kubota, T., Kimura, Y., Kinoshita, H., Wong, T.K.S., Wei, J.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/95745
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/95745

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