Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry
10.1016/j.nimb.2003.08.040
Saved in:
Main Authors: | , , , |
---|---|
Other Authors: | |
Format: | Article |
Published: |
2014
|
Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/95774 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
id |
sg-nus-scholar.10635-95774 |
---|---|
record_format |
dspace |
spelling |
sg-nus-scholar.10635-957742023-10-30T20:09:46Z Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry Mangelinck, D. Lee, P.S. Osipowitcz, T. Pey, K.L. PHYSICS Characterization MOS Rutherford backscattering spectrometry Silicide Sub-micron devices 10.1016/j.nimb.2003.08.040 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 215 3-4 495-500 NIMBE 2014-10-16T09:15:39Z 2014-10-16T09:15:39Z 2004-02 Article Mangelinck, D., Lee, P.S., Osipowitcz, T., Pey, K.L. (2004-02). Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 215 (3-4) : 495-500. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2003.08.040 0168583X http://scholarbank.nus.edu.sg/handle/10635/95774 000188795500025 Scopus |
institution |
National University of Singapore |
building |
NUS Library |
continent |
Asia |
country |
Singapore Singapore |
content_provider |
NUS Library |
collection |
ScholarBank@NUS |
topic |
Characterization MOS Rutherford backscattering spectrometry Silicide Sub-micron devices |
spellingShingle |
Characterization MOS Rutherford backscattering spectrometry Silicide Sub-micron devices Mangelinck, D. Lee, P.S. Osipowitcz, T. Pey, K.L. Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry |
description |
10.1016/j.nimb.2003.08.040 |
author2 |
PHYSICS |
author_facet |
PHYSICS Mangelinck, D. Lee, P.S. Osipowitcz, T. Pey, K.L. |
format |
Article |
author |
Mangelinck, D. Lee, P.S. Osipowitcz, T. Pey, K.L. |
author_sort |
Mangelinck, D. |
title |
Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry |
title_short |
Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry |
title_full |
Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry |
title_fullStr |
Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry |
title_full_unstemmed |
Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry |
title_sort |
analysis of laterally non-uniform layers and sub-micron devices by rutherford backscattering spectrometry |
publishDate |
2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/95774 |
_version_ |
1781786327600070656 |