Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry

10.1016/j.nimb.2003.08.040

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Bibliographic Details
Main Authors:	Mangelinck, D., Lee, P.S., Osipowitcz, T., Pey, K.L.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Characterization MOS Rutherford backscattering spectrometry Silicide Sub-micron devices
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/95774
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-95774
record_format	dspace
spelling	sg-nus-scholar.10635-957742023-10-30T20:09:46Z Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry Mangelinck, D. Lee, P.S. Osipowitcz, T. Pey, K.L. PHYSICS Characterization MOS Rutherford backscattering spectrometry Silicide Sub-micron devices 10.1016/j.nimb.2003.08.040 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 215 3-4 495-500 NIMBE 2014-10-16T09:15:39Z 2014-10-16T09:15:39Z 2004-02 Article Mangelinck, D., Lee, P.S., Osipowitcz, T., Pey, K.L. (2004-02). Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 215 (3-4) : 495-500. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2003.08.040 0168583X http://scholarbank.nus.edu.sg/handle/10635/95774 000188795500025 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Characterization MOS Rutherford backscattering spectrometry Silicide Sub-micron devices
spellingShingle	Characterization MOS Rutherford backscattering spectrometry Silicide Sub-micron devices Mangelinck, D. Lee, P.S. Osipowitcz, T. Pey, K.L. Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry
description	10.1016/j.nimb.2003.08.040
author2	PHYSICS
author_facet	PHYSICS Mangelinck, D. Lee, P.S. Osipowitcz, T. Pey, K.L.
format	Article
author	Mangelinck, D. Lee, P.S. Osipowitcz, T. Pey, K.L.
author_sort	Mangelinck, D.
title	Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry
title_short	Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry
title_full	Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry
title_fullStr	Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry
title_full_unstemmed	Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry
title_sort	analysis of laterally non-uniform layers and sub-micron devices by rutherford backscattering spectrometry
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/95774
_version_	1781786327600070656

Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry

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