Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry
10.1016/j.nimb.2003.08.040
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Main Authors: | Mangelinck, D., Lee, P.S., Osipowitcz, T., Pey, K.L. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/95774 |
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Institution: | National University of Singapore |
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