Effect of low fluence laser annealing on ultrathin Lu2 O3 high- k dielectric

10.1063/1.2771065

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Main Authors:	Darmawan, P., Lee, P.S., Setiawan, Y., Ma, J., Osipowicz, T.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/96319
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-96319
record_format	dspace
spelling	sg-nus-scholar.10635-963192023-10-26T09:20:58Z Effect of low fluence laser annealing on ultrathin Lu2 O3 high- k dielectric Darmawan, P. Lee, P.S. Setiawan, Y. Ma, J. Osipowicz, T. PHYSICS 10.1063/1.2771065 Applied Physics Letters 91 9 - APPLA 2014-10-16T09:22:02Z 2014-10-16T09:22:02Z 2007 Article Darmawan, P., Lee, P.S., Setiawan, Y., Ma, J., Osipowicz, T. (2007). Effect of low fluence laser annealing on ultrathin Lu2 O3 high- k dielectric. Applied Physics Letters 91 (9) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2771065 00036951 http://scholarbank.nus.edu.sg/handle/10635/96319 000249156100083 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.2771065
author2	PHYSICS
author_facet	PHYSICS Darmawan, P. Lee, P.S. Setiawan, Y. Ma, J. Osipowicz, T.
format	Article
author	Darmawan, P. Lee, P.S. Setiawan, Y. Ma, J. Osipowicz, T.
spellingShingle	Darmawan, P. Lee, P.S. Setiawan, Y. Ma, J. Osipowicz, T. Effect of low fluence laser annealing on ultrathin Lu2 O3 high- k dielectric
author_sort	Darmawan, P.
title	Effect of low fluence laser annealing on ultrathin Lu2 O3 high- k dielectric
title_short	Effect of low fluence laser annealing on ultrathin Lu2 O3 high- k dielectric
title_full	Effect of low fluence laser annealing on ultrathin Lu2 O3 high- k dielectric
title_fullStr	Effect of low fluence laser annealing on ultrathin Lu2 O3 high- k dielectric
title_full_unstemmed	Effect of low fluence laser annealing on ultrathin Lu2 O3 high- k dielectric
title_sort	effect of low fluence laser annealing on ultrathin lu2 o3 high- k dielectric
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/96319
_version_	1781786431560089600

Effect of low fluence laser annealing on ultrathin Lu2 O3 high- k dielectric

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