Effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide
10.1063/1.1367398
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sg-nus-scholar.10635-963352023-10-25T07:37:27Z Effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide Cui, J. Rusli Yoon, S.F. Teo, E.J. Yu, M.B. Chew, K. Ahn, J. Zhang, Q. Osipowicz, T. Watt, F. PHYSICS 10.1063/1.1367398 Journal of Applied Physics 89 11 I 6153-6158 JAPIA 2014-10-16T09:22:15Z 2014-10-16T09:22:15Z 2001-06 Article Cui, J., Rusli, Yoon, S.F., Teo, E.J., Yu, M.B., Chew, K., Ahn, J., Zhang, Q., Osipowicz, T., Watt, F. (2001-06). Effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide. Journal of Applied Physics 89 (11 I) : 6153-6158. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1367398 00218979 http://scholarbank.nus.edu.sg/handle/10635/96335 000169149900043 Scopus |
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PHYSICS Cui, J. Rusli Yoon, S.F. Teo, E.J. Yu, M.B. Chew, K. Ahn, J. Zhang, Q. Osipowicz, T. Watt, F. |
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Cui, J. Rusli Yoon, S.F. Teo, E.J. Yu, M.B. Chew, K. Ahn, J. Zhang, Q. Osipowicz, T. Watt, F. |
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Cui, J. Rusli Yoon, S.F. Teo, E.J. Yu, M.B. Chew, K. Ahn, J. Zhang, Q. Osipowicz, T. Watt, F. Effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide |
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Cui, J. |
title |
Effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide |
title_short |
Effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide |
title_full |
Effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide |
title_fullStr |
Effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide |
title_full_unstemmed |
Effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide |
title_sort |
effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide |
publishDate |
2014 |
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http://scholarbank.nus.edu.sg/handle/10635/96335 |
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1781786434488762368 |