Effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide

10.1063/1.1367398

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Bibliographic Details
Main Authors: Cui, J., Rusli, Yoon, S.F., Teo, E.J., Yu, M.B., Chew, K., Ahn, J., Zhang, Q., Osipowicz, T., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96335
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-963352023-10-25T07:37:27Z Effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide Cui, J. Rusli Yoon, S.F. Teo, E.J. Yu, M.B. Chew, K. Ahn, J. Zhang, Q. Osipowicz, T. Watt, F. PHYSICS 10.1063/1.1367398 Journal of Applied Physics 89 11 I 6153-6158 JAPIA 2014-10-16T09:22:15Z 2014-10-16T09:22:15Z 2001-06 Article Cui, J., Rusli, Yoon, S.F., Teo, E.J., Yu, M.B., Chew, K., Ahn, J., Zhang, Q., Osipowicz, T., Watt, F. (2001-06). Effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide. Journal of Applied Physics 89 (11 I) : 6153-6158. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1367398 00218979 http://scholarbank.nus.edu.sg/handle/10635/96335 000169149900043 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1063/1.1367398
author2 PHYSICS
author_facet PHYSICS
Cui, J.
Rusli
Yoon, S.F.
Teo, E.J.
Yu, M.B.
Chew, K.
Ahn, J.
Zhang, Q.
Osipowicz, T.
Watt, F.
format Article
author Cui, J.
Rusli
Yoon, S.F.
Teo, E.J.
Yu, M.B.
Chew, K.
Ahn, J.
Zhang, Q.
Osipowicz, T.
Watt, F.
spellingShingle Cui, J.
Rusli
Yoon, S.F.
Teo, E.J.
Yu, M.B.
Chew, K.
Ahn, J.
Zhang, Q.
Osipowicz, T.
Watt, F.
Effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide
author_sort Cui, J.
title Effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide
title_short Effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide
title_full Effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide
title_fullStr Effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide
title_full_unstemmed Effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide
title_sort effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/96335
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