Fabrication of high aspect ratio 100 nm metallic stamps for nanoimprint lithography using proton beam writing

10.1063/1.1773933

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Main Authors:	Ansari, K., Van Kan, J.A., Bettiol, A.A., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/96594
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-965942024-11-14T01:01:36Z Fabrication of high aspect ratio 100 nm metallic stamps for nanoimprint lithography using proton beam writing Ansari, K. Van Kan, J.A. Bettiol, A.A. Watt, F. PHYSICS 10.1063/1.1773933 Applied Physics Letters 85 3 476-478 APPLA 2014-10-16T09:25:15Z 2014-10-16T09:25:15Z 2004-07-19 Article Ansari, K., Van Kan, J.A., Bettiol, A.A., Watt, F. (2004-07-19). Fabrication of high aspect ratio 100 nm metallic stamps for nanoimprint lithography using proton beam writing. Applied Physics Letters 85 (3) : 476-478. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1773933 00036951 http://scholarbank.nus.edu.sg/handle/10635/96594 000222680400043 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.1773933
author2	PHYSICS
author_facet	PHYSICS Ansari, K. Van Kan, J.A. Bettiol, A.A. Watt, F.
format	Article
author	Ansari, K. Van Kan, J.A. Bettiol, A.A. Watt, F.
spellingShingle	Ansari, K. Van Kan, J.A. Bettiol, A.A. Watt, F. Fabrication of high aspect ratio 100 nm metallic stamps for nanoimprint lithography using proton beam writing
author_sort	Ansari, K.
title	Fabrication of high aspect ratio 100 nm metallic stamps for nanoimprint lithography using proton beam writing
title_short	Fabrication of high aspect ratio 100 nm metallic stamps for nanoimprint lithography using proton beam writing
title_full	Fabrication of high aspect ratio 100 nm metallic stamps for nanoimprint lithography using proton beam writing
title_fullStr	Fabrication of high aspect ratio 100 nm metallic stamps for nanoimprint lithography using proton beam writing
title_full_unstemmed	Fabrication of high aspect ratio 100 nm metallic stamps for nanoimprint lithography using proton beam writing
title_sort	fabrication of high aspect ratio 100 nm metallic stamps for nanoimprint lithography using proton beam writing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/96594
_version_	1821209498068451328

Fabrication of high aspect ratio 100 nm metallic stamps for nanoimprint lithography using proton beam writing

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