Fabrication of high aspect ratio 100 nm metallic stamps for nanoimprint lithography using proton beam writing

Fabrication of high aspect ratio 100 nm metallic stamps for nanoimprint lithography using proton beam writing

10.1063/1.1773933

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Bibliographic Details
Main Authors:	Ansari, K., Van Kan, J.A., Bettiol, A.A., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/96594
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

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