Growth of carbon nitride thin films by radio-frequency-plasma-enhanced chemical vapor deposition at low temperatures

Growth of carbon nitride thin films by radio-frequency-plasma-enhanced chemical vapor deposition at low temperatures

Journal of Materials Research

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Main Authors: Lim, S.F., Wee, A.T.S., Lin, J., Chua, D.H.C., Tan, K.L.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96756
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-967562015-01-16T14:56:21Z Growth of carbon nitride thin films by radio-frequency-plasma-enhanced chemical vapor deposition at low temperatures Lim, S.F. Wee, A.T.S. Lin, J. Chua, D.H.C. Tan, K.L. PHYSICS Journal of Materials Research 14 3 1153-1159 JMREE 2014-10-16T09:27:10Z 2014-10-16T09:27:10Z 1999-03 Article Lim, S.F.,Wee, A.T.S.,Lin, J.,Chua, D.H.C.,Tan, K.L. (1999-03). Growth of carbon nitride thin films by radio-frequency-plasma-enhanced chemical vapor deposition at low temperatures. Journal of Materials Research 14 (3) : 1153-1159. ScholarBank@NUS Repository. 08842914 http://scholarbank.nus.edu.sg/handle/10635/96756 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Journal of Materials Research
author2 PHYSICS
author_facet PHYSICS
Lim, S.F.
Wee, A.T.S.
Lin, J.
Chua, D.H.C.
Tan, K.L.
format Article
author Lim, S.F.
Wee, A.T.S.
Lin, J.
Chua, D.H.C.
Tan, K.L.
spellingShingle Lim, S.F.
Wee, A.T.S.
Lin, J.
Chua, D.H.C.
Tan, K.L.
Growth of carbon nitride thin films by radio-frequency-plasma-enhanced chemical vapor deposition at low temperatures
author_sort Lim, S.F.
title Growth of carbon nitride thin films by radio-frequency-plasma-enhanced chemical vapor deposition at low temperatures
title_short Growth of carbon nitride thin films by radio-frequency-plasma-enhanced chemical vapor deposition at low temperatures
title_full Growth of carbon nitride thin films by radio-frequency-plasma-enhanced chemical vapor deposition at low temperatures
title_fullStr Growth of carbon nitride thin films by radio-frequency-plasma-enhanced chemical vapor deposition at low temperatures
title_full_unstemmed Growth of carbon nitride thin films by radio-frequency-plasma-enhanced chemical vapor deposition at low temperatures
title_sort growth of carbon nitride thin films by radio-frequency-plasma-enhanced chemical vapor deposition at low temperatures
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/96756
_version_ 1681091717515706368

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