Growth of carbon nitride thin films by radio-frequency-plasma-enhanced chemical vapor deposition at low temperatures
Journal of Materials Research
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Main Authors: | Lim, S.F., Wee, A.T.S., Lin, J., Chua, D.H.C., Tan, K.L. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/96756 |
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Institution: | National University of Singapore |
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