Growth of carbon nitride thin films by radio-frequency-plasma-enhanced chemical vapor deposition at low temperatures

Journal of Materials Research

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Bibliographic Details
Main Authors: Lim, S.F., Wee, A.T.S., Lin, J., Chua, D.H.C., Tan, K.L.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96756
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Institution: National University of Singapore
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