High-temperature properties of a low dielectric constant organic spin-on glass for multilevel interconnects

High-temperature properties of a low dielectric constant organic spin-on glass for multilevel interconnects

10.1366/0003702011953469

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Bibliographic Details
Main Authors: Wang, C.Y., Shen, Z.X., Zheng, J.Z.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
FT-IR
Low dielectric material
Methyl silsesquioxane
TGA
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96823
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Institution: National University of Singapore
Description
Summary:10.1366/0003702011953469

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