High-temperature properties of a low dielectric constant organic spin-on glass for multilevel interconnects

High-temperature properties of a low dielectric constant organic spin-on glass for multilevel interconnects

10.1366/0003702011953469

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Bibliographic Details
Main Authors: Wang, C.Y., Shen, Z.X., Zheng, J.Z.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
FT-IR
Low dielectric material
Methyl silsesquioxane
TGA
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96823
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Institution: National University of Singapore
id sg-nus-scholar.10635-96823
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spelling sg-nus-scholar.10635-968232023-10-30T22:42:36Z High-temperature properties of a low dielectric constant organic spin-on glass for multilevel interconnects Wang, C.Y. Shen, Z.X. Zheng, J.Z. PHYSICS FT-IR Low dielectric material Methyl silsesquioxane TGA 10.1366/0003702011953469 Applied Spectroscopy 55 10 1347-1351 APSPA 2014-10-16T09:27:58Z 2014-10-16T09:27:58Z 2001-10 Article Wang, C.Y., Shen, Z.X., Zheng, J.Z. (2001-10). High-temperature properties of a low dielectric constant organic spin-on glass for multilevel interconnects. Applied Spectroscopy 55 (10) : 1347-1351. ScholarBank@NUS Repository. https://doi.org/10.1366/0003702011953469 00037028 http://scholarbank.nus.edu.sg/handle/10635/96823 000171965100012 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic FT-IR
Low dielectric material
Methyl silsesquioxane
TGA
spellingShingle FT-IR
Low dielectric material
Methyl silsesquioxane
TGA
Wang, C.Y.
Shen, Z.X.
Zheng, J.Z.
High-temperature properties of a low dielectric constant organic spin-on glass for multilevel interconnects
description 10.1366/0003702011953469
author2 PHYSICS
author_facet PHYSICS
Wang, C.Y.
Shen, Z.X.
Zheng, J.Z.
format Article
author Wang, C.Y.
Shen, Z.X.
Zheng, J.Z.
author_sort Wang, C.Y.
title High-temperature properties of a low dielectric constant organic spin-on glass for multilevel interconnects
title_short High-temperature properties of a low dielectric constant organic spin-on glass for multilevel interconnects
title_full High-temperature properties of a low dielectric constant organic spin-on glass for multilevel interconnects
title_fullStr High-temperature properties of a low dielectric constant organic spin-on glass for multilevel interconnects
title_full_unstemmed High-temperature properties of a low dielectric constant organic spin-on glass for multilevel interconnects
title_sort high-temperature properties of a low dielectric constant organic spin-on glass for multilevel interconnects
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/96823
_version_ 1781786547420397568

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